Very Low Energy Scanning Electron Microscopy
نویسنده
چکیده
Very low energy scanning electron microscopy is introduced as a scanning version of the low energy electron microscopy, i.e. the emission electron microscopy with the sample excited by means of a parallel wave of electrons. The incident primary electrons are retarded in the cathode lens consisting of a negatively biased sample (cathode) and earthed anode. Interaction of slow electrons with solid targets is discussed and principles of the instrument are described together with selected applications demonstrating image contrasts not available in conventional scanning electron microscopy devices.
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